The Effects of Surface Modifications on Tin-Doped Indium Oxide Films: Optoelectrical, Wettability and XPS Investigations

Article Preview

Abstract:

Surface modifications were performed on the tin-doped indium oxide (ITO) substrates for optoelectronic devices, using the different processing techniques. The effects of modification methods on the surface properties of ITO substrates were characterized by X-ray photoelectron spectroscopy (XPS), atomic force microscopy (AFM), ultraviolet-visible (UV-vis) spectrophotometer, standard goniometry and four-probe meter, respectively. The surface free energy as the sum of the dispersion and polar components was evaluated from the measured contact angles using the Owens-Wendt approach. Experimental results demonstrate that except the optical transmittance of the ITO, the surface properties including the stoichiometry, morphology, wettability and sheet resistance of the ITO substrates strongly depend on the modification methods. Compared with the other treatments, the oxygen plasma treatment increases the oxygen concentration and decreases the carbon concentration, reduces the surface roughness and the sheet resistance, and enhances the surface free energy and the polarity, and thereby more effectively improves the surface properties of ITO substrates.

You might also be interested in these eBooks

Info:

Periodical:

Key Engineering Materials (Volumes 373-374)

Pages:

718-721

Citation:

Online since:

March 2008

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2008 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] S.A. Van Slyke, C.H. Chen and C.W. Tang: Appl. Phys. Lett. Vol. 69 (1996), p.2160.

Google Scholar

[2] C.C. Wu, C.I. Wu, J.C. Sturm and A. Kahn: Appl. Phys. Lett. Vol. 70 (1997), p.1348.

Google Scholar

[3] J.S. Kim. M. Granström, R.H. Friend, N. Johansson, W.R. Salaneck, R. Daik, W.J. Feast and F. Cacialli: J. Appl. Phys. Vol. 84 (1998), p.6859.

Google Scholar

[4] Z.Z. You and J.Y. Dong: Microelectron. J. Vol. 38 (2007), p.108.

Google Scholar

[5] M.G. Mason, L.S. Hung, C.W. Tang, S.T. Lee, K.W. Wong and M. Wang: J. Appl. Phys. Vol. 86 (1999), p.1688.

Google Scholar

[6] Z.Z. You, J.Y. Dong and S.D. Fang: Phys. Stat. Sol. A Vol. 201 (2004), p.3221.

Google Scholar

[7] D. Briggs and M.P. Seah: Practical Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy (Wiley & Sons, New York 1983).

Google Scholar

[8] S. Wu: Polymer Interface and Adhesion (Dekker, New York 1982).

Google Scholar

[9] S.K. So, W.K. Choi, C.H. Cheng, L.M. Leung and C.F. Kwong: Appl. Phys. A Vol. 68 (1999), p.447.

Google Scholar

[10] J.S. Kim, P.K.H. Ho, D.S. Thomas, R.H. Friend, F. Cacialli, G.W. Bao and S.F.Y. Li: Chem. Phys. Lett. Vol. 315 (1999), p.307.

Google Scholar

[11] C.H. Yi, C.H. Jeong, Y.H. Lee, Y.W. Ko and G.Y. Yeom: Surf. Coat. Technol. Vol. 177-178 (2004), p.711.

Google Scholar