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Fabrication of (Ba,Sr)TiO3 Thin Films by Hydrothermal Crystallization of Sol-Gel Precursor

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Abstract:

Barium strontium titanate (BST) ferroelectric thin films have been successfully prepared on the single crystal silicon substrates using hydrothermal crystallization of sol-gel precursor, which combined the conventional sol-gel process and the hydrothermal method. The precursor film was deposited by the dip-coating method. The multiplayer BST gel films were hydrothermally treated in a Teflon vessel at low temperature of 160-180 °C for 1-3.5 h. The influences of the reaction conditions on the structure and crystallizing degree of BST thin films were discussed. We find that the temperature of as-dried gel films and post hydrothermal treatment are the critical parameters determining the quality of formation of BST thin films. Under optimized conditions, we can obtain well-developed perovskite BST films with smooth and pinhole-free surfaces. These results reveal that this technique is a promising low temperature process for the fabricating of thin films.

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Periodical:

Key Engineering Materials (Volumes 336-338)

Pages:

95-97

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.336-338.95

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Online since:

April 2007

Authors:

Jing Yun Ma, Hong Yan Miao, Guo Qiang Tan, Zheng Qiu Sun

Keywords:

BST, Ferroelectric Thin Film, Hydrothermal Crystallization, Low-Temperature

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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