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Micromachining Characteristics of Sapphire with Fifth HG Nd:YAG Laser

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Abstract:

In order to reduce the thermal influences in laser machining of sapphire surface, effects of a short-pulse ultra-violet laser were investigated. For the UV laser, the Fifth harmonic generation (Fifth HG) wave of an Nd:YAG laser (wavelength:213nm) was utilized. Significant reduction of thermal damages on the surface was demonstrated with the Fifth HG pulses compared to longer wavelengths of the Nd:YAG laser. It was shown that the control of depth of bottom surface with reduced thermal influences was possible in lower fluence cases(less than 40 J/cm2) with a homogenized beam and smooth surface roughness Ra < 200nm was obtainable.

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Periodical:

Key Engineering Materials (Volume 329)

Pages:

589-594

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.329.589

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Online since:

January 2007

Authors:

Toshiyuki Noji, Kazuo Nakamura, Hideyuki Horisawa, Nobuo Yasunaga

Keywords:

5th HG Wave, Micro Machining, Nd-YAG Laser, Sapphire

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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References

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