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Discussion on the Radial Superresolution of the Two-Photon Microfabrication

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Abstract:

In order to improve the radial superresolution of the two-photon microfabrication, the superresolution diffraction theory was introduced in detail. The theoretical analysis of the photosensitive resist based on the exciting power and concentration of free radical was given.. And the superresolution diffractive optical element was applied in the two-photon microfabrication system. Simulation results indicated that the radial superresolution of the two-photon microfabrication can be improved with the superresolution diffractive optical element.

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Periodical:

Key Engineering Materials (Volume 329)

Pages:

601-606

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.329.601

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Online since:

January 2007

Authors:

P. Wei, Yu Zhu, Q.F. Tan, G.H. Duan, G.H. Gao

Keywords:

Radial Superresolution, Superresolution Diffractive Optical Theory, Two-Photon Microfabrication

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] B H Cumpston, S P Ananthavel, S Barlow, et al. Two-photon polymerization imitators for three-dimensional optical data storage and microfabrication[J]. Nature, 1999, 398: 51-54.

DOI: 10.1038/17989

Google Scholar

[2] Satoshi Kawata, Hong-Bo Sun, Tomokazu Tanaka, et al. Finer features for functional micro devices[J]. Nature, 2001, 412: 697-698.

DOI: 10.1038/35089130

Google Scholar

[3] Z.W. JIANG, D.J. YUAN, A.D. ZHU, et al. The Development of the Two-photon Threedimension Microfabrication Technology and the Experiment System[J]. Optics and Precision Engineering, 2003, 3, 234-238. In Chinese.

Google Scholar

[4] Z.W. JIANG. The Analysis of the Femtosecond Laser Two-photon Three Dimension Microfabrication. (PhD University of Science and Technology of China 2004). In Chinese.

Google Scholar

[5] Z.W. JIANG, A.D. XIA, W.H. HUANG, et al. Analysis on the Resolution of two-photon Threedimension Microfabrication[J]. Microfabrication technology, 2004, 2�30-36. In Chinese.

Google Scholar

[6] Z.W. HAN. Macromolecule Science Tutorial(Trans Huadong Science and Technology University Publications, China 2001). In Chinese.

Google Scholar

[7] Haitao Liu, Yingbai Yan, Qiaofeng Tan, et al. Theories for the design of diffractive superresolution elements and limits og optical superresolution. J. Opt. Soc. Am. A, 2002, 9(11): 2185-2193.

DOI: 10.1364/josaa.19.002185

Google Scholar

[8] Haitao Liu, Yingbai Yan, et al. Theories for the design of a hybrid refractive-diffractive superresolution lens with high numerical aperture. J. Opt. Soc. Am. A, 2003 20(5): 913-924.

DOI: 10.1364/josaa.20.000913

Google Scholar

[9] H.T. LIU. Investigations of Design Methods of Diffractive Optical Elements to Implement Optical Superresolution. (PhD Tsinghua University China 2004). In Chinese.

Google Scholar

[10] J. K. Strayer. Linear Programming and Its Application. New York� Springer-Verlag, (1989).

Google Scholar

[11] W.X. XING, J.X. XIE. Modern Optimal Calculation Method. (Trans Tsinghua University Publications, Beijing 1999). In Chinese. Acknowledgments The work was supported by the Project 973(Nos. 2003CB716204).

Google Scholar