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Preparation of FeCoZrBCu Thin Films and their Effect of Microstructure on Magnetic Properties

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Abstract:

In this work, (Fe,Co)–Zr–B–Cu films have been deposited on glass and Si substrates by DC magnetron sputtering method. X-ray diffraction analysis was used to identify the structure of the films. A transmission electron microscope (TEM) was employed to observe the microstructure for the films. Magnetic properties at room temperature were investigated by a Vibrating Sample Magnetometer (VSM). It was obtained that the as-deposited films on glass and Si substrates were in an amorphous state. In addition, it has been found that the coercivity is dependent on film thicknesses.

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Periodical:

Materials Science Forum (Volumes 546-549)

Pages:

2163-2166

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.546-549.2163

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Online since:

May 2007

Authors:

Jia Ping Cui, Li Zhong, Xiao Fang Bi

Keywords:

FeCoZrBCu Films, Magnetron Sputtering, Microstructure, Soft Magnetic Property

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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