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Silicon Carbide and Related Materials 2006

Materials Science Forum Volumes 556 - 557

• Papers
• Abstracts

• p53 4H-SiC Epitaxial Layers Grown on On-Axis Si-Face Substrate   [ 272 K ]
  Authors: Jawul Hassan, J.P. Bergman, Anne Henry, Henke Pedersen, Patrick J. McNally, Erik Janzén
• p57 A Designed Experiment Approach to Improvement and Understanding of the SiC Epitaxial Growth Process   [ 280 K ]
  Authors: James D. Oliver, Brian H. Ponczak
• p61 Analysis of SiC CVD Growth in a Horizontal Hot-Wall Reactor by Experiment and 3D Modelling   [ 551 K ]
  Authors: Y. Shishkin, Rachael L. Myers-Ward, S.E. Saddow, A. Galyukov, A. Vorob'ev, D. Brovin, D. Bazarevskiy, R. Talalaev, Yu.N. Makarov
• p65 Boron Doping during Vapor-Liquid-Solid Growth of Homoepitaxial 4H-SiC Layers   [ 1 M ]
  Authors: Maher Soueidan, Gabriel Ferro, B. Nsouli, Nada Habka, Veronique Soulière, Ghassan Younes, K. Zahraman, Jean Marie Bluet, Yves Monteil
• p69 Comparison of Chlorine Based In Situ Etching of 4H SiC Substrates   [ 3 M ]
  Authors: Mike F. MacMillan, Mark J. Loboda, Jian Wei Wan, Gil Yong Chung, E.P. Carlson, Michael J. Spaulding, D. Deese
• p73 CVD of 6H-SiC on Non-Basal Quasi Polar Faces   [ 1 M ]
  Authors: Y. Shishkin, Shailaja P. Rao, Olle Kordina, I. Agafonov, Andrei A. Maltsev, Jawul Hassan, Anne Henry, Catherine Moisson, S.E. Saddow
• p77 Developing an Effective and Robust Process for Manufacturing Bipolar SiC Power Devices   [ 136 K ]
  Authors: Joseph J. Sumakeris, Brett A. Hull, Michael J. O'Loughlin, Marek Skowronski, V. Balakrishna
• p81 Development of High Growth Rate SiC Epi-Reactor with Controlled Thermal Gradient   [ 348 K ]
  Authors: M. Ito, Hidekazu Tsuchida, Isaho Kamata, L. Storasta
• p85 Effect of Additional Silane on In Situ H₂ Etching prior to 4H-SiC Homoepitaxial Growth   [ 859 K ]
  Authors: Kazutoshi Kojima, Satoshi Kuroda, Hajime Okumura, Kazuo Arai
• p89 Epitaxial Growth of 4H-SiC on (000-1) C-Face Substrates by Cold-Wall and Hot-Wall Chemical Vapor Deposition   [ 1 M ]
  Authors: René A. Stein, Bernd Thomas, Christian Hecht