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Silicon Carbide and Related Materials 2006

Materials Science Forum Volumes 556 - 557

• Papers
• Abstracts

• p133 Low-Temperature Halo-Carbon Homoepitaxial Growth of 4H-SiC: Morphology, Doping, and Role of HCl Additive   [ 192 K ]
  Authors: Huang De Lin, Galyna Melnychuk, Jeffery L. Wyatt, Yaroslav Koshka
• p137 Optimisation of Epitaxial Layer Growth with HCl Addition by Optical and Electrical Characterization   [ 725 K ]
  Authors: Lucia Calcagno, G. Izzo, G. Litrico, G. Galvagno, A. Firrincieli, Salvatore Di Franco, Marco Mauceri, Stefano Leone, Giuseppe Pistone, G. Condorelli, F. Portuese, Giuseppe Abbondanza, Gaetano Foti, Francesco La Via
• p141 Progress in Cold-Wall Epitaxy for 4H-SiC High-Power Devices   [ 354 K ]
  Authors: L.B. Rowland, G.T. Dunne, J. Fronheiser, Stanislav Soloviev
• p145 Scaling of Chlorosilane SiC CVD to Multi-Wafer Epitaxy System   [ 269 K ]
  Authors: Jian Wei Wan, Mark J. Loboda, Mike F. MacMillan, Gil Yong Chung, E.P. Carlson, V.M. Torres
• p149 Selective Epitaxial Growth of 4H-SiC with SiO₂ Mask by Low-Temperature Halo-Carbon Homoepitaxial Method   [ 869 K ]
  Authors: Bharat Krishnan, Hrishikesh Das, Huang De Lin, Yaroslav Koshka
• p153 SiC Epitaxial Layers Grown by Sublimation Method and their Electrical Properties   [ 795 K ]
  Authors: Chi Kwon Park, Gi Sub Lee, Ju Young Lee, Myung Ok Kyun, Won Jae Lee, Byoung Chul Shin, Shigehiro Nishino
• p157 Very High Growth Rate Epitaxy Processes with Chlorine Addition   [ 146 K ]
  Authors: Francesco La Via, Stefano Leone, Marco Mauceri, Giuseppe Pistone, G. Condorelli, Giuseppe Abbondanza, F. Portuese, G. Galvagno, Salvatore Di Franco, Lucia Calcagno, Gaetano Foti, Gian Luca Valente, Danilo Crippa
• p161 SiC Heteropolytype Structures Grown by Sublimation Epitaxy   [ 446 K ]
  Authors: A.A. Lebedev
• p167 Carbonization of Porous Silicon for 3C-SiC Growth   [ 750 K ]
  Authors: A.V. Vasin, Yukari Ishikawa, Noriyoshi Shibata, Jarno Salonen, Vesa Pekka Lehto
• p171 Carbonization Study of Different Silicon Orientations   [ 607 K ]
  Authors: Andrea Severino, C. Bongiorno, Stefano Leone, Marco Mauceri, Giuseppe Pistone, G. Condorelli, Giuseppe Abbondanza, F. Portuese, Gaetano Foti, Francesco La Via