Current Situation and Trend of Ultra-Precision Abrasive Machining

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With increasing trend toward automatic manufacture and demands for improved quality, position of ultra-precision machining processes is considered as more and more important. As the main processes of ultra-precision machining, abrasive machining processes can be chiefly divided into free abrasive processes and fixed abrasive processes. Typical techniques such as chemicalmechanical polishing, ELID, Flat Honing and so on have been reviewed and compared with each other in preliminary aspects such as surface quality, finish accuracy and finish efficiency. The development trend of ultra-precision abrasive machining will have great efforts on realizing the integration with high accuracy, high efficiency and low cost.

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Key Engineering Materials (Volumes 364-366)

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690-695

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December 2007

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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[1] Hahn P.O.: Microelectronic Engineering Vol. 56(2001), p.3.

Google Scholar

[2] N. Yasunaga, A. Obara and N. Tarumi: Res. Electrotech. Lab Vol. 776(1977), p.50.

Google Scholar

[3] R . Komanduri: Annals of CIRP Vol. 45(1996), p.509.

Google Scholar

[4] G. Nanz, L E. Camilletti: IEEE Transactions on Semiconductor Manufacturing Vol. 8(1995), p.382.

Google Scholar

[5] G.H. Fu, Abhijit Chandra: IEEE Transactions on Semiconductor Manufacturing Vol. 14(2001), p.406.

Google Scholar

[6] Y. Mori, N. Ikawa, T. Okuda and K. Yamagata: Technical Reports of the Osaka University Vol. 26(1976), p.283.

Google Scholar

[7] Y. Mori, K. Yamauchi and K. Endo: Precision Engineering Vol. 10(1988), p.24.

Google Scholar

[8] Y. Namba, H. Tsuwa: Annals of CIRP Vol. 26(1977), p.325.

Google Scholar

[9] Y. Tani, K . Kawata: Annals of CIRP Vol. 33 (1984), p.217.

Google Scholar

[10] N. Umehara: Annals of CIRP Vol. 43 (1994), p.185.

Google Scholar

[11] Bo Zhang, Akira Nakajima: Precision Engineering Vol. 27(2003), p.1.

Google Scholar

[12] J. Lkeno, Y. Tani and H. Sato: Annals of CIRP Vol. 39(1990), p.341.

Google Scholar

[13] J. Lkeno, Y. Tani and A. Fukutani: Annals of CIRP Vol. 40(1991), p.351.

Google Scholar

[14] Y. Tani, etc: Annals of CIRP Vol. 46(1997), p.245.

Google Scholar

[15] C. J. Evans: Annals of CIRP Vol. 47(1998), p.239.

Google Scholar

[16] J. Watanabe, J. Suzuki: Annals of CIRP Vol. 30(1981), p.91.

Google Scholar

[17] Miyamoto I, Ezawa T, Nishimura K: Nanatechnology Vol. 1(1990), p.44.

Google Scholar

[18] H.Y. Wang, D.L. Bourell: Materials Science and Technology Vol. 19(2003), p.382.

Google Scholar

[19] Information on http: /www. cree. com/Products/GAN/downloads/CMP_for_Decoration. pdf.

Google Scholar

[20] M. Raghunandan, R. Komanduri: Trans. ASME J. Manf. Sci. and Eng. Vol. 120(1998), p.376.

Google Scholar

[21] Information on http: /www. ntem. com. cn/kjjx2/0427_sd_2. htm. (2002).

Google Scholar

[22] M. Jiang, R. Komanduri: Key Engineering Materials, Vol. 202-203(2001), p.1.

Google Scholar

[23] Y. Namba, H. Kobayashi, etc: Annals of the CIRP Vol. 48(1999), p.277.

Google Scholar

[24] R.I. Trezona, D.N. Allsopp, I.M. Hutchings: Wear Vol. 225-229(1999), p.205.

Google Scholar

[25] K. Adachi , I.M. Hutchings: Wear Vol. 255(2003), p.23.

Google Scholar

[26] T. Kasai, K. Horio, T. Karaki-Doy: Annals of CIRP Vol. 39 (1990), p.297.

Google Scholar

[27] R.E. Rosensweig: Ferrohydrodynmics(Cambridge University Press, U. K 1985).

Google Scholar

[28] S. D. Jacobs , S. A. Arrasmith, etc: 101 annual Meeting of the American ceramic Society; Indianapolis, Indian. (1999).

Google Scholar

[29] H. Ohmori, T . Nakagawa: Annals of CIRP Vol. 39(1990), p.329.

Google Scholar

[30] H. Ohmori, T . Nakagawa: Annals of CIRP Vol. 44(1995), p.287.

Google Scholar

[31] D. Kramer, etc: Annals of CIRP Vol. 48(1999), p.265.

Google Scholar

[32] Hans H. Gatzen, J. Chris Maetzig: Precision Engineering Vol. 21(1997), p.134.

Google Scholar

[33] Eda H, Zhou L, Nakano H, Kondo R, Shinizu J: Annals of CIRP Vol. 50(2001), p.225.

Google Scholar

[34] Z. J. Pei, Strasbaugh Alan: International Journal of Machine Tools and Manufacture Vol. 41(2001), p.659.

Google Scholar

[35] H.K. Xu, S. Jahanmir: J. Mater. Sci. Vol. 30(1995), p.2235.

Google Scholar

[36] H. Ohmori, etc:. Annals of the CIRP Vol. 44(1995), p.287.

Google Scholar

[37] S.M. Liu, D.L. Yu: Journal Of Chinese Electron Microscopy Society Vol. 17(1998), p.51.

Google Scholar

[38] Y. Hagiuda, K. Karikomi, T. Nakagawa: Annals of the CIRP Vol. 30(1981), p.227.

Google Scholar

[39] H.K. Tonshoff, R. Egger. W. Longerich, D. Preising: Manufacturing Engineering Vol. 120(1998), p.52.

Google Scholar

[40] M. Anzai, H. Otaki, etc: Journal of the Japan Society of Powder and Powder Metallurgy Vol. 40(1993), p.833.

Google Scholar

[41] Shigeki Khikawa, Hirosha Ona: Annals of the CIRP Vol. 42(1993), p.421.

Google Scholar