Paper Titles
Metal Bipolar Plate with Micro Sensors
p.861
Research of Vacuum Pump with Nano-Lubricant
p.867
Solid Deformable Multibody Dynamic Problems in Precision Manufacturing Systems
p.873
Thermal Transpiration of Liquid in Nanoscale Channel: A Molecular Dynamics Simulation Study
p.879
The Electrochemical Micro-Fabrication Method for Micro-Scale Flow Channels
p.885
Improving Machining Accuracy of the EMM Process through Multi-Physics Analysis
p.891
Characteristics of Micro-Precision Machining of Glasses by Powder Blasting
p.897
Study on the Influence Factors of Electrochemical Micromachining
p.903
Research on Surface Microstructures of Nanocomposite Ceramics in Two-Dimensional Ultrasonic Ultraprecision Grinding
p.909

The Electrochemical Micro-Fabrication Method for Micro-Scale Flow Channels

Article Preview

Abstract:

Due to lack of desirable mechanical properties of silicon substrate; the current trend of micro-fabrication technology is towards metallic materials. In this study, the electrochemical micromachining (EMM) technology is developed to fabricate micro-scale flow channels on thin metallic 316L stainless steel plate. The cathode electrode, the tool, is the mirror image of flow channels. It was produced by the MEMS and UV-LIGA technology and the size is 200μm in width and 500μm in height for the intension to fabricate a serpentine flow channel of 200μm in both depth and width. Because of the electrode size, the process control parameters and geometrical features surpassed conventional and CMOS methods. The flow channels on 0.6mm thick SS 316L plates were fabricated by EMM process within 30 seconds with effective area of 625mm2. The dimensions of flow channel were varying from 1504m to 5004m in width and about 2004m in depth. The results demonstrate the EMM technology produces good quality metallic flow channels efficiently.

You might also be interested in these eBooks
Optics Design and Precision Manufacturing Technologies View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 364-366)

Pages:

885-890

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.364-366.885

Citation:

Cite this paper

Online since:

December 2007

Authors:

Shuo Jen Lee, Yu Ming Lee, Chi Yuan Lee, J.J. Lai, K.T. Yang, F.H. Kuan

Keywords:

Electrochemical Micro Machining, Flow Channel, Micro-Electromechanical System (MEMS), UV-LIGA

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2008 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] M. Datta and D. Landolt: Electrochimica Acta Vol. 45 (2000) p.2535.

Google Scholar

[2] J.A. McGeough: Principle of electrochemical machining, London : champman & Hall (1974).

Google Scholar

[3] B. Bhattacharyya, B. Doloi and P. S. Sridhar: J. Materials Processing Technology Vol. 113 (2001) p.301.

Google Scholar

[4] Datta, Madhav, Romankiw and T. Lubomyr: J. Electrochemical Society Vol. 136 (1989) p.285.

Google Scholar

[5] Y. Li, Y. F. Zheng, G. Yang and L. Q. Peng: Sensors and Actuators Vol. A 108 (2003) p.144.

Google Scholar

[6] T. Kurita, K. Chikamori, S. Kubota and M. Hattori: Int. J. Machine Tools & Manufacture Vol. 46 (2006) p.1311.

Google Scholar

[7] X. Lu and Y. Leng: J. Materials Processing Technology Vol. 169 (2005) p.173.

Google Scholar

[8] B. Bhattacharyya, J. Munda and M. Malapati: J. of Machine Tools & Manufacture Design Vol. 44 (2004) p.1577.

DOI: 10.1016/j.ijmachtools.2004.06.006

Google Scholar

[9] B. Bhattacharyya and J. Munda, J. of Machine Tool and Manufacture Vol. 43 (2003) p.1301.

Google Scholar

[10] J. Hopenfeld and R. R. Cole, J. Engineering for Industry (1966) p.455.

Google Scholar