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The High-Efficient Low-Cost Wheel-Grinding Technology for CVD Diamond Films

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Abstract:

CVD diamond films have been used in many high-tech fields with the industrial and scientific developments, while the lagging of the polishing technology for the CVD diamond films has limited their widely applications. This paper presents a high-efficient low-cost wheel-grinding technology for CVD diamond polishing, and the two key techniques of this technology are introduced in detail based on thermo-chemical polishing technology. Furthermore, wheel grinding technology exhibits a promising perspective for the widely application in the diamond films.

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Periodical:

Advanced Materials Research (Volumes 24-25)

Pages:

295-302

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.24-25.295

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Cite this paper

Online since:

September 2007

Authors:

Zhu Ji Jin, Xing Wei Ma, Ze Wei Yuan

Keywords:

CVD Diamond Film, Graphitization, Thermal Chemical Polishing, Wheel-Grinding

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© 2007 Trans Tech Publications Ltd. All Rights Reserved

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