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Effect of Low Energy ECR Ion Beam Irradiation on Micro Nano Scale Mechanical Properties of Silicon

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Abstract:

Most mechanical parts like bearings, gears, and shafts are produced by finishing processes such as hard turning, grinding and/or honing. The durability and reliability of these precision products are directly influenced by mechanical behavior of material. If those parts are in micro nano scale such as micro interconnector, micro valve, micro actuator, and micro switch in that case micro nano mechanical properties is an important factor for better performance. This present paper discusses the low energy ECR ion beam irradiation effects on mechanical property of material in micronano scale. To complete this research ion beams were irradiated for different accelerating energy to Si surface. Nano indentations were done for hardness and elasticity measurement. AFM was used for roughness and depth measurement. From data analysis It shows accelerating energy is an important factor to control mechanical property of material during nano scale fabrication by ion beam.

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Periodical:

Applied Mechanics and Materials (Volumes 10-12)

Pages:

344-347

DOI:

https://doi.org/10.4028/www.scientific.net/AMM.10-12.344

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Online since:

December 2007

Authors:

Ying Xue Yao, Shahjada Ahmed Pahlovy, Sadao Momota

Keywords:

Elasticity, Fabrication, Ion Beam Irradiation, Mechanical Property, Nanohardness

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] Sadao momota, Y. Nojiri, Y. Hamagawa, and et al: Nuclear Instruments and Methods in Physics Research, Vol. 242 (2006B), pp.247-249.

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[2] Sami Franssila: Introduction to micro fabrication, 2005 Edition.

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[3] Bernhard Wolf: Handbook of Ion Sources, 1995 Edition.

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[4] L.C. Feldman, J.W. Mayer, S.T. Picraux: Materials Analysis by Ion Channeling (Academic Press, New York, 1982).

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