Paper Titles
Finite Element Analysis and Design of Monolithic Multilayer Piezoelectric Micromanipulator
p.218
A Novel Piezoelectric Nebulizer
p.221
Fabrication of Piezoelectric Cantilever Beam Based on Nanostructured PZT Film
p.223
Magnitude Versus Frequency Performance of Vibration Acceleration Sensor Based on Cymbal Transducer
p.226
Effects of the Top-Electrode Annealing on the Ferroelectric Properties of BiFeO3 Thin Films
p.230
Electrical Characteristics of Fluorine Passivated MOCVD-TiO2 Film on (NH4)2Sx Treated GaAs
p.232
Interfacial Behavior of SiC-Based Boundary Layer Capacitors
p.235
Microwave Sintering of YSZ Electrolyte Materials for SOFC
p.238
Properties of YSZ Electrolyte Sintered at 1250°C
p.241

Effects of the Top-Electrode Annealing on the Ferroelectric Properties of BiFeO3 Thin Films

Article Preview

Abstract:

BiFeO3 films were prepared by chemical solution method on Pt/Ti/SiO2/Si substrates. The ferroelectric properties of Pt/BiFeO3/Pt capacitors were investigated, and the effect of recovery annealing applied after Pt top electrode deposition was discussed. The pure phase film with recovery annealing exhibits lower leakage current and higher remanent polarization than those without post-annealing. The leakage current is reduced by three orders of magnitude, the remanent polarization increases from 2.59μC/cm2 to 3.44μC/cm2. The recovery anneals applied after top electrode deposition may optimize the ferroelectric performance by removing the effect of structural defects formed by sputtering.

You might also be interested in these eBooks
High-Performance Ceramics V View Preview

Info:

Periodical:

Key Engineering Materials (Volumes 368-372)

Pages:

230-231

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.368-372.230

Citation:

Cite this paper

Online since:

February 2008

Authors:

Shan Liu, Jian Li, Wei Pan

Keywords:

BFO, Ferroelectric Property, MFM, Recovery Anneal

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2008 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] J. Wang, J.B. Neaton, H. Zheng, et al.: Science Vol. 299 (2003), p.1719.

Google Scholar

[2] M. Kurasawa and P.C. Mcintyre: J. Appl. Phys. Vol 97(2005), 104110.

Google Scholar

[3] A.I. Zaslavsky, A.G. Tutov and Akad: Dokl, Nauk SSSR. Vol. 135(1960), p.815.

Google Scholar

[4] J.S. Kim, C. Cheon II, Y.N. Choi and P.W. Jang: J. Appl. Phys. Vol. 93 (2003), p.9263.

Google Scholar

[5] S. Iakovlev, C.H. Solterbeck, M. Kuhnke and M.E. Souni: J. Appl. Phys. Vol. 97 (2005), 094901.

Google Scholar

[6] H. Liu, Z. Liu, Q. Liu and K. Yao: Thin Solid Films Vol. 500 (2006), p.105 Fig. 2 Cross-section SEM image of BiFeO3 film Fig. 3 Hysteresis loops of BiFeO3 films Fig. 4 J-E curves of BiFeO3 films.

DOI: 10.1016/j.tsf.2005.11.041

Google Scholar