Defects in Semiconductors 14
Materials Science Forum Volumes 10 - 12
doi:10.4028/0-87849-551-7
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p1123
Electron Microscopy Data for Threshold Energy of Point Defect Creation in Silicon
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420 K
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Authors: Liudmila I. Fedina, A.L. Aseev, S.G. Denisenko, L.S. Smirnov
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p1129
Beam-Induced Annealing of Defects Created by Imlantation at 30 K in Si
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266 K
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Authors: Brian Bech Nielsen, J.U. Andersen
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p1135
Annealing Behaviour of High Concentration of Sn and Sb Implanted in Silicon
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224 K
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Authors: G. Weyer, Arne Nylandsted-Larsen, F.T. Pedersen, R. Galloni, R. Rizzoli
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p1141
Structural Defects in Ion-Implanted Silicon Observed by Perturbed Angular Correlation
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195 K
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Authors: Manfred Deicher, G. GrĂ¼bel, E. Recknagel, Th. Wichert
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p1147
Defects Related to Nitrogen Implantation in Silicon Single Crystals
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359 K
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Authors: M. Bode, A. Jakubowicz, H.U. Habermeier
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p1153
Precipitate Morphologies in Oxygen - Ion Implanted Silicon: A High Resolution Electron Microscopy Study
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478 K
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Authors: G. Vanderschaeve, R.W. Carpenter, J.C. Barry, C.J. Varker, S.R. Wilson
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p1159
Dose Dependence of Defects in Silicon Produced by High Dose, High Temperature O+ Implantation
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174 K
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Authors: A. Hobbs, R.C. Barklie, K.J. Reeson, P.L.F. Hemment
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p1165
Investigation of the Lattice Defects in P Ion Implanted Silicon
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461 K
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Authors: H. Bender, D. Avau, W. Vandervorst, J. Van Landuyt, H.E. Maes
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p1171
Interaction of Point Defects with Implanted Hydrogen in Undoped Germanium
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207 K
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Authors: Kazuyoshi Ito, Ichiro Baba, Kaoru Mizuno, Takashi Ito
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p1177
Evolution of Defect Structures around Te Implanted in GaAs during Solid Phase Epitaxial Regrowth
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201 K
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Authors: D. Schroyen, P. Hendrickx, G. Langouche