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Gettering and Defect Engineering in Semiconductor Technology

Solid State Phenomena Volumes 19 - 20

• Papers
• Abstracts

• p611 TEM Investigations on the Structure and Stability of Diffusion Barriers for VLSI Contacts   [ 751 K ]
  Authors: S. Hopfe, M. Reiche
• p617 Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates   [ 573 K ]
  Authors: K. Höppner, Bernd Tillack, R. Banisch, H.H. Richter, O. Joachim
• p625 SOI by Silicon Wafer Direct Bonding - Problems of Wafer Warpage and Surface Chemistry   [ 232 K ]
  Authors: G. Kissinger, W. Kissinger, H. Hofmann, Joachim Krüger
• p631 Temperature Profiles Induced by Recrystallization of Silicon-on-Insulator with Scanning Incoherent Light Line Source   [ 220 K ]
  Authors: H.H. Richter, H. Andrä, Bernd Tillack, O. Joachim, W. Weinelt, R. Banisch, K. Hoeppner
• p639 Zinc and Zinc-Impurity Pairs in Silicon   [ 428 K ]
  Authors: C.A.J. Ammerlaan, H.E. Altink