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Shallow Impurities in Semiconductors V

Materials Science Forum Volumes 117 - 118

• Papers
• Abstracts

• p201 Carbon-Oxygen Complexes and Oxygen Precipitation in Silicon Crystals Observed by Low-Temperature Infrared Absorption   [ 289 K ]
  Authors: Y. Shirakawa, Hiroshi Yamada-Kaneta, Tomoya Ogawa
• p207 Shifts of the Infrared Absorption Peaks of Oxygen in Silicon Caused by Germanium-Doping   [ 230 K ]
  Authors: Hiroshi Yamada-Kaneta, Ch. Kaneta, Tomoya Ogawa
• p213 Observation of Five Additional Thermal Donors and Kinetics of Thermal Donor Formation and Annihilation at Temperatures above 500°C in Czochralski-Grown Si   [ 244 K ]
  Authors: W. Götz, Gerhard Pensl, W. Zulehner
• p219 Ultrashallow Hydrogen-Like Thermal Donors in Silicon Crystals   [ 301 K ]
  Authors: A. Hara, M. Aoki, T. Fukuda, A. Ohsawa
• p225 Formation of Oxygen Clusters in Quenched Cz- and MCz-Si Crystals   [ 269 K ]
  Authors: Atsushi Ikari, Hiroyo Haga, O. Yoda, Akira Uedono, Yusuke Ujihira
• p231 Simulation of Oxygen Precipitation and Denuded Zone Formation during Thermal Anneals   [ 261 K ]
  Authors: M. Schrems
• p237 Characterization of Excimer Laser Annealing of Arsenic Implanted Silicon   [ 177 K ]
  Authors: T. Akane, S. Matsumoto, I. Mizushima
• p243 Heavily Arsenic Doping into Si by ArF Excimer Laser Irradiation Using Tertiarybutylarsine (tBAs)   [ 182 K ]
  Authors: Shigefusa F. Chichibu, T. Nii, T. Akane, S. Matsumoto
• p249 Effective-Mass-Like Excited Pseudo-Donor States of a Complex Metastable Defect in Silicon   [ 198 K ]
  Authors: J.H. Svensson, Erik Janzén, Olle Kordina, Bo Monemar
• p255 Zeeman Study of 735meV Photoluminescence Band in Iron-Doped Silicon   [ 140 K ]
  Authors: M.I. Càlao, M. Celeste Carmo