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Semiconductor Processing and Characterization with Lasers

Materials Science Forum Volumes 173 - 174

• Papers
• Abstracts

• p73 Pulsed Laser Ablation: A Method for Deposition and Processing of Semiconductors at an Atomic Level   [ 432 K ]
  Authors: J.J. Dubowski
• p81 Vacuum Ultraviolet Deposition of Silicon Dielectrics   [ 485 K ]
  Authors: Ian W. Boyd
• p93 Conditions for Heterophase Junction Formation in Laser Deposited PbTe Films   [ 311 K ]
  Authors: V. Gaydarova
• p99 High-Quality Narrow-Gap Thin Films Produced by Quasi-Continuous-Wave IR-Laser-Assisted Evaporation   [ 212 K ]
  Authors: S.V. Plyatsko, Yu.S. Gromovoj
• p105 Laser-Induced Etching of Si Surfaces; the Effect of Weak Background Light   [ 102 K ]
  Authors: H. Grebel, T. Gayen
• p109 Gas-Dynamic Effects in Laser Pulse Sputtering of Aluminium   [ 293 K ]
  Authors: A. Peterlongo, A. Miotello, R. Kelly
• p117 Laser Deposited Phthalocyanine- and Fullerene-Based Photovoltaic Cells   [ 235 K ]
  Authors: A.I. Shevalevskii, V.P. Poponin, Liudmila.L. Larina
• p123 Synthesis of ß-FeSi₂-Films by Pulsed Laser Deposition   [ 220 K ]
  Authors: M. Panzner, H. Mai, B. Schöneich, B. Selle, H. Lange, W. Henrion, Th. Wittke, A. Lenk, A. Teresiak, R. Grötzschel
• p129 Complex Semiconductor Compound Targets for Pulsed Laser Deposition   [ 334 K ]
  Authors: H. Dittrich, M. Klose, M. Brieger, R. Schäffler, H.W. Schock
• p135 Pulsed Laser Deposition and Characterization of CuInSe₂ Thin Films for Solar Cell Applications   [ 302 K ]
  Authors: R. Schäffler, M. Klose, M. Brieger, H. Dittrich, H.W. Schock