Epitaxial Growth of SiC on α-SiC Using Si<sub>2</sub>Cl<sub>6</sub>+C<sub>3</sub>H<sub>8</sub>+H<sub>2</sub> System

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Epitaxial Growth of SiC on α-SiC Using Si₂Cl₆+C₃H₈+H₂ System

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