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Doping of Nitrides into Zinc Oxide Films

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Periodical:

Key Engineering Materials (Volume 248)

Pages:

87-90

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.248.87

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Online since:

August 2003

Authors:

Masahiro Sanmyo, Yasumasa Tomita, Kenkichiro Kobayashi

Keywords:

Beryllium Nitride, p-Type Zinc Oxide, Sputtering, X-Ray Diffraction (XRD), X-Ray Photoelectron Spectroscopy (XPS)

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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