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Advances in Abrasive Technology VI

Key Engineering Materials Volumes 257 - 258

• Papers
• Abstracts

• p423 Prediction of Material Removal in Polishing Free-Form Surfaces with Fixed Abrasives   [ 250 K ]
  Authors: L. Zhang
• p429 Improvement of Simulation Accuracy in Precision CMP with Oscillation Speed Control   [ 220 K ]
  Authors: Kenichiro Yoshitomi, Atsunobu Une, Masaaki Mochida
• p433 A 3D Numerical Study of the Polishing Behavior during an Oxide Chemical Mechanical Planarization Process   [ 2 M ]
  Authors: D.H. Lee, D.J. Kwon, Yi Koan Hong, Jin Goo Park
• p441 Fabrication of High-Quality Surfaces on Micro Tools by the ELID Grinding Technique   [ 7 M ]
  Authors: Kazutoshi Katahira, Hitoshi Ohmori, Yoshihiro Uehara, Y. Watanabe, Wei Min Lin, J. Komotori, M. Mizutani
• p447 Abrasive Micromachining with a Multi-Axes Vibration Tool   [ 1 M ]
  Authors: N. Moronuki, Fusahito Yoshida, Y. Sato, A. Kaneko
• p453 A Study of the Micro Pole Structure Fabrication and Application Technology by Micro End-Milling Process   [ 3 M ]
  Authors: T. Je, J. Lee, Doo Sun Choi, E. Lee, B. Shin, K. Whang
• p459 A Study on the Micro Machining of Si Wafer Using Surface Chemical Reaction   [ 318 K ]
  Authors: J.M. Park, Hae Do Jeong
• p465 An Investigation on the 3D Micromachining Techniques Based on a SPM   [ 284 K ]
  Authors: Yong Da Yan, T. Sun, Shen Dong, Ying Chun Liang, K. Cheng
• p473 Improvement of Corrosion Resistance and Mechanical Properties of the Biomaterial Ti-6Al-4V Alloy by ELID Grinding   [ 246 K ]
  Authors: M. Mizutani, J. Komotori, Kazutoshi Katahira, Y. Watanabe, Hitoshi Ohmori
• p477 Micro-Polishing of Complex and Flat Parts Using a Chemical Oil Based ER Fluid   [ 1 M ]
  Authors: J.J. Lee, Eun Sang Lee, S.K. Min, Young Hee Kim, Kyu Hong Hwang