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Development of a Novel Micro-Spray-Assembly Process for Multilayer Ultra-Thin Film Formation
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Development of a Novel Micro-Spray-Assembly Process for Multilayer Ultra-Thin Film Formation

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Abstract:

A novel micro-spray-assembly process and an automatic device to fabricate multilayer ultra-thin film are introduced. Employing self-assembly monolayer (SAM) technique, ultra-thin film can be assembled by utilizing the micro-spray-assembly device. The thickness and roughness of each monolayer can be controlled by varying various materials attributes, i.e., deposition time, ionic strength, pH value, molecular concentration and by selecting different manufacturing parameters of the automatic device such as spraying rate, size of micro-drop, N2 flow rate, temperature of N2 flow.

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Periodical:

Journal of Metastable and Nanocrystalline Materials (Volume 23)

Pages:

331-334

DOI:

https://doi.org/10.4028/www.scientific.net/JMNM.23.331

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Online since:

January 2005

Authors:

Zheng Peng, Ling Xue Kong

Keywords:

Automatic Device, Micro-Spray-Assembly, Multilayer, Self-Assembly Monolayer, Ultra-Thin Film

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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