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Study on the Cracking of SiO2-TiO2 Films Prepared by Sol-Gel Method

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Abstract:

In this paper, the cracking behavior of sol-gel-derived SiO2-TiO2 films on glass-ceramics substrates is characterized by means of DTA, XRD and SEM. The SiO2-TiO2 films are deposited by sol-gel dip coating with tetrabutyl orthotitanate (Ti(OBu)4) and tetraethyl orthosilicate (TEOS) as raw precursors. The result shows that the cracking of the films is mainly related to the surface cleanliness of the substrate, the thermal expansion coefficients of the film and the substrate, the viscosity of the mixed sol, and the unbalanced stress produced during drying and heating process. The films without cracks were obtained by modifying the composition of sol and controlling the relative humidity and the heating rate of heat treatment.

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Periodical:

Materials Science Forum (Volumes 475-479)

Pages:

1227-1230

DOI:

https://doi.org/10.4028/www.scientific.net/MSF.475-479.1227

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Cite this paper

Online since:

January 2005

Authors:

Feng Zhou, Kai Ming Liang, Hua Shao

Keywords:

Crack, SiO2-TiO2, Sol-Gel (SG), Thin Film

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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References

[1] J.K. Dong, H.H. Sung, H.O. Sung and J.K. Eui: Materials Letters Vol. 57 (2002), p.355.

Google Scholar

[2] L. Wicikowski, B. Kusz, L. Murawski, K. Szaniawska, B. Susla: Vacuum Vol. 54 (1999), p.221.

Google Scholar

[3] X. Orignac, D. Barbier, O. McCarthy, E. Yeatman, R. M. Almeida: Opt. Mater. Vol. 12 (1999), p.1.

Google Scholar

[4] R.M. Almeida, X.M. Du, X. Orignac, D. Barbier: J. Sol-Gel Sci. Technol. Vol. 14 (1999), p.209.

Google Scholar

[5] P. Chrysicopoulou, D. Davazoglou, Chr. Trapalis and G. Kordas: Thin Solid Films Vol. 323 (1998), p.188.

DOI: 10.1016/s0040-6090(97)01018-3

Google Scholar

[6] H. Tang, K. Prasad, R. Sanjine´s and F. Le´vy: sensor actuators B-chem. Vol. 26 (1995), p.71.

Google Scholar

[7] H. Kostlin, G. Frank, G. Hebbinghaus, H. Auding and K. Denissen: J. Non-Cryst. Solids Vol. 218 (1997), p.347.

DOI: 10.1016/s0022-3093(97)00169-5

Google Scholar

[8] Y. Yan, S.R. Chaudhuri and A. Sarkar, Synthesis: J. Am. Ceram. Soc. Vol. 79 (1996), p.1061.

Google Scholar

[9] J. Yu, X. Zhao and Q. Zhao: Mater. Chem. Phys. Vol. 69 (2001), p.25.

Google Scholar

[10] A. Karthikeyan, Rui M. Almeida: J. Non-Cryst. Solids Vol. 274 (2000), p.169.

Google Scholar

[11] S. G. Croll: J. Appl. Polym. Sci. Vol. 23 (1979), p.847.

Google Scholar

[12] C. J. Brinker, A. J. Hurd, P. R. Schunk, G. C. Frye and C. S. Ashley: J. Non-Cryst. Solids Vol. 147&148 (1992), p.424.

DOI: 10.1016/s0022-3093(05)80653-2

Google Scholar