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Silicon Carbide and Related Materials 2004

Materials Science Forum Volumes 483 - 485

• Papers
• Abstracts

• p133 LPE of Silicon Carbide Using Diluted Si-Ge Flux   [ 913 K ]
  Authors: Octavian Filip, Boris M. Epelbaum, Matthias Bickermann, Albrecht Winnacker
• p137 Large Area SiC Epitaxial Layer Growth in a Warm-Wall Planetary VPE Reactor   [ 169 K ]
  Authors: Al A. Burk, Michael J. O'Loughlin, Michael J. Paisley, Adrian R. Powell, M.F. Brady, Stephan G. Müller, S.T. Allen
• p141 Epitaxial Growth of n-Type 4H-SiC on 3" Wafers for Power Devices   [ 473 K ]
  Authors: Bernd Thomas, Christian Hecht
• p147 Epitaxial Overgrowth of 4H-SiC for Devices with p-Buried Floating Junction Structure   [ 212 K ]
  Authors: Johji Nishio, Chiharu Ota, Takashi Shinohe, Kazutoshi Kojima, Hajime Okumura
• p151 Reduction of Stacking Faults in Fast Epitaxial Growth of 4H-SiC and its Impacts on High-Voltage Schottky Diodes   [ 198 K ]
  Authors: H. Fujiwara, Tsunenobu Kimoto, T. Tojo, Hiroyuki Matsunami
• p155 Development of Epitaxial SiC Processes Suitable for Bipolar Power Devices   [ 257 K ]
  Authors: Joseph J. Sumakeris, Mrinal K. Das, Seo Young Ha, Edward Hurt, Kenneth G. Irvine, Michael J. Paisley, Michael J. O'Loughlin, John Palmour, Marek Skowronski, H. McD. Hobgood, Calvin H. Carter Jr.
• p159 Characteristics of Trench-Refilled 4H-SiC P-N Junction Diodes Fabricated by Selective Epitaxial Growth   [ 103 K ]
  Authors: Can Hua Li, P.A. Losee, Joseph Seiler, I. Bhat, T.P. Chow
• p163 Molecular Beam Epitaxy of Semiconductor Nanostructures Based on SiC   [ 643 K ]
  Authors: Andreas Fissel
• p169 Computer Simulation of the Early Stages of Nano Scale SiC Growth on Si   [ 787 K ]
  Authors: K.L. Safonov, Yu.V. Trushin, Oliver Ambacher, Jörg Pezoldt
• p173 Growth of 3C-(Si_1-xC_1-y)Ge_x+y Layers on 4H-SiC by Molecular Beam Epitaxy   [ 1 M ]
  Authors: Petia Weih, Henry Romanus, Thomas Stauden, Lothar Spieß, Oliver Ambacher, Jörg Pezoldt