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Investigation on the Dressing Shape of Vacuum Chuck in Wafer Rotation Grinding
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Energy-Mode Adjustment in Laser Processing a Small Vitrified CBN Grinding Wheel
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Energy-Mode Adjustment in Laser Processing a Small Vitrified CBN Grinding Wheel

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Abstract:

A study of the energy-mode adjustment and application was presented to investigate the effects of adjustable methods on energy mode. Three methods of energy-mode adjustment were used: by circular profile itself, by an optical scanning expander and deformable mirror. The circular profile naturally modifies energy density with the changes of incident angle. The optical scanning expander was used to turn a Gaussian beam into a uniform beam. Also a novel technique of deformable mirror was designed to obtain a more controllable energy mode for laser selective processing. Moreover, the models describing energy modes were developed to improve laser-processing performance. An experiment was arranged to simulate single-tip diamond truing and produced a result, as shown in the SEM photo, quite similar to a fine thread. The results were discussed to reveal the mechanism of laser processing.

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Periodical:

Key Engineering Materials (Volumes 291-292)

Pages:

177-182

DOI:

https://doi.org/10.4028/www.scientific.net/KEM.291-292.177

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Online since:

August 2005

Authors:

Xu Yue Wang, Yong Bo Wu, Ren Ke Kang, Jun Wang, Wen Ji Xu, M. Kato

Keywords:

Laser Processing, Mode Adjustment, Predictive Model, Vitrified CBN Grinding Wheel

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© 2005 Trans Tech Publications Ltd. All Rights Reserved

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