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Measurement Technology and Intelligent Instruments VI

Key Engineering Materials Volumes 295 - 296

• Papers
• Abstracts

• p65 A High Precision AFM for Nanometrology of Large Area Micro-Structured Surfaces   [ 530 K ]
  Authors: J. Aoki, Wei Gao, S. Kiyono, T. Ono
• p71 A Study on the Mechanism of a New High Speed Scanning Miniature Nano-Measurement Probe   [ 484 K ]
  Authors: Kuang Chao Fan, Y.J. Chen
• p77 Use of Fiber Interferometer for AFM Cantilever Probe Displacement Control   [ 260 K ]
  Authors: N.C. Shie, T.L. Chen, Kai Yuan Cheng
• p83 Determining the Radial Modulus of DNA Measured by VPSFM   [ 214 K ]
  Authors: Y.H. Chen, X.J. Li, X.F. Zhou, Jia Lin Sun, W.H. Huang, J. Hu
• p89 Pitch Calibration by an Active Temperature Controlled Traceable Atomic Force Microscope and a Laser Diffractometer   [ 24 M ]
  Authors: Chao Jung Chen, S.P. Pan, L.C. Chang
• p95 Micro-Force Calibration with an All-Coil Magnetic Levitation   [ 260 K ]
  Authors: S.W. Hsu, T.L. Chen
• p101 Effect of Residual Stresses on a Micromachined Z-Axis Vibrating Rate Gyroscope   [ 809 K ]
  Authors: A.P. Qiu, Y. Su, S.R. Wang, B.L. Zhou
• p107 A Measurement System for Step Imprint Lithography   [ 174 K ]
  Authors: H.Z. Liu, Bing Heng Lu, Y.C. Ding, D.C. Li, Yi Ping Tang, T. Jin
• p113 Design and Simulation of a DETF for Use in a Resonant Gyroscope   [ 90 K ]
  Authors: Yi Lun Zhu, S.R. Wang, A.P. Qiu
• p119 Micro Angle Measurement for a Scanning Stage   [ 176 K ]
  Authors: Q.G. Liu, M. Li, D.C. Li, Z.G. Li, X.T. Hu