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• p693 Effects of Al-C Ion-Implantation and Annealing in Epitaxial 6H-SiC Studied by Structural and Optical Techniques
  Authors: Zhe Chuan Feng, Ian T. Ferguson, R.A. Stall, K. Li, Y. Shi, H. Singh, Kiyoshi Tone, Jian H. Zhao, A.T.S. Wee, K.L. Tan, F. Adar, B. Lenain