MSF - Authors (Klettke, O.)
ISSN: 1662-9752
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p961
Formation of Precipitates in 6H-SiC after Oxygen Implantation and Subsequent Annealing
Authors: Béla Pécz, O. Klettke, Gerhard Pensl, J. Stoemenos
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p459
Oxygen-Related Defect Centers Observed in 4H/6H-SiC Epitaxial Layers Grown under CO2 Ambient
Authors: O. Klettke, Gerhard Pensl, Tsunenobu Kimoto, Hiroyuki Matsunami
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p379
Majority Traps Observed in H+- or He+-Implanted Al-Doped 6H-SiC by Admittance and Deep Level Transient Spectroscopy
Authors: Sergey A. Reshanov, O. Klettke, Gerhard Pensl
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p459
Electrical Characterization of Erbium-Implanted 4H-SiC Epilayers
Authors: Sergey A. Reshanov, O. Klettke, Gerhard Pensl, Wolfgang J. Choyke