MSF - Authors (Lin, L.)
ISSN: 1662-9752
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p191
Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering
Authors: Y.M. Lei, Y.H. Yu, L.L. Cheng, L. Lin, B. Sundaraval, E.Z. Luo, S. Lin, C.X. Ren, W.Y. Cheung, S.P. Wong, J.B. Xu, S.C. Zou, I.H. Wilson