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SSP - Authors (Kabansky, A.)

ISSN: 1012-0394

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• p195 Integrated Cleaning: Application of Densified Fluid Cleaning (DFC) to Post-Etch Residue Removal
  Authors: V. Starov, D. Beery, Alex Kabansky
• p59 Plasma Cleaning for W Polymetal Gate
  Authors: Alex Kabansky, Harry Lee