SSP - Keywords (AAS)
ISSN: 1012-0394-
p81
A Quantitative Method of Metal Impurities Depth Profiling for Gettering Evaluation in Silicon Wafers
Authors: Mohammad B. Shabani, T. Yoshimi, S. Okuuchi, A. Kaniava -
p385
Determination of Effective Diffusion Coefficient of Copper in Silicon by Diffusion from Bulk into the Polysilicon Backside
Authors: Mohammad B. Shabani, K. Hirano, Y. Shiina, T. Kihara, T. Shingyoji -
p461
Cu Determination in Silicon Wafers: A Comparison between Electrical and Chemical Measurements
Authors: Vito Raineri, D. Cali, M. Camalleri, M. Di Dio, A. Puglisi