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Gettering and Defect Engineering in Semiconductor Technology

Solid State Phenomena Volumes 6 - 7

• Papers
• Abstracts

• p329 EPR Detection of Complex Platinum-Related Defects in Silicon   [ 192 K ]
  Authors: M. Höhne
• p335 Defect Kinetics and Impurity Diffusion During Hot Implants Into Silicon   [ 223 K ]
  Authors: K. Holldack, H. Kerkow, M. Reiche
• p341 The Peculiarities of Deep Level Defect Passivation in SI by Atomic Hydrogen   [ 51 K ]
  Authors: Sergei V. Koveshnikov, S.V. Nosenko, E.B. Yakimov
• p343 Dislocation Motion in Compound Semiconductors   [ 400 K ]
  Authors: Jürgen Schreiber, H.S. Leipner, H.-R. Höche
• p349 Dislocation Structures after Microdeformation of CaAs Single Crystals   [ 304 K ]
  Authors: H.S. Leipner, M. Surowiec
• p355 The Effect on the Schottky Barrier Height of Diffusion of Pt into Si From PtSi   [ 176 K ]
  Authors: L. Moller, Jacques Chevallier, Arne Nylandsted-Larsen
• p361 Electron Pulse Irradiation of Semiconductor Devices   [ 172 K ]
  Authors: M. Lenk, R. Mehnert, A. Müller, L. Prager, E. Koch
• p367 Charge Collection Microscopy in Gettering and Defect Engineering   [ 1 M ]
  Authors: Martin Kittler
• p383 Lifetime in Silicon   [ 589 K ]
  Authors: D.K. Schroder
• p395 Scanning Infra-Red Microscope Investigation of Oxide Particles in Czochralski Silicon Heat-Treated for Intrinsic Gettering   [ 769 K ]
  Authors: Z. Laczik, G.R. Booker, Robert Falster