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Gettering and Defect Engineering in Semiconductor Technology

Solid State Phenomena Volumes 32 - 33

• Papers
• Abstracts

• p547 Investigation of Strain in Si_1-xGe_x/Si Heterostructures and Local Isolation Structures by Convergent Beam Electron Diffraction   [ 386 K ]
  Authors: A. Armigliato, R. Balboni, S. Frabboni, Jan Vanhellemont
• p553 New Applications of Diffraction Analysis for Dislocation Structure in High Lattice-Mismatch MBE Grown Epitaxial Structures   [ 363 K ]
  Authors: R.N. Kyutt, J. Heydenreich, S.S. Ruvimov, R. Scholz, T.S. Argunova, S.V. Ivanov, P.S. Kop'ev, L.M. Sorokin
• p559 Detection of Threading Dislocations by EBIC in a SiGe Epilayer with Graded Buffer   [ 261 K ]
  Authors: Martin Kittler, C. Ulhaq-Bouillet, J. Hersener, Friedrich Schäffler
• p565 HREM and DLTS of Σ37(610) and Σ29(520 )[001] Tilt Grain Boundaries in Ge Bicrystals   [ 372 K ]
  Authors: N.I. Bochkareva, J. Heydenreich, S. Ruvimov, R. Scholz, K. Scheerschmidt, L.M. Sorokin
• p571 TEM In Situ Investigations of Interfacial Processes in the Pd/a-GeSi System   [ 317 K ]
  Authors: M. Reiche, F. Edelman, J. Heydenreich
• p577 Micro-Raman Investigations of Elastic and Plastic Strain Relief in Si_1-xGe_x-Heterostructures   [ 246 K ]
  Authors: B. Dietrich, E. Bugiel, H.J. Osten, P. Zaumseil
• p583 Raman Study of the Phonon-Plasmon Modes in the Short Period GaAs/AlAs Superlattices   [ 213 K ]
  Authors: M.D. Efremov, V.A. Volodin, V.V. Bolotov
• p589 Positron Annihilation on Thermal Defects in Cz-Si and Fz-Si   [ 196 K ]
  Authors: N.Yu. Arutyunov
• p595 Characterization of MBE Grown Si/Si_1-xGe_x/Si Structures Using n⁺p-Diodes   [ 337 K ]
  Authors: K. Schmalz, H. Rücker, Hermann G. Grimmeiss, B. Dietrich, H. Frankenfeld, W. Mehr, H.J. Osten, P. Schley
• p601 Investigations on Surface and Bulk Semiconductor Properties Using Wavelength Dependent TRMC Measurements   [ 379 K ]
  Authors: G. Betz, W. Gründler, J. Quick, Hans Richter