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Gettering anf Defect Engineering in Semiconductor Technology IX

Solid State Phenomena Volumes 82 - 84

• Papers
• Abstracts

• p255 Passivation of Al/Si Interface by Chemical Treatment: Schottky Barrier Height and Plasma Etch Induced Defects   [ 204 K ]
  Authors: Zsolt E. Horváth, M. Ádám, P. Godio, G. Borionetti, I.A. Szabó, E. Gombia, Vo Van Tuyen
• p259 Impact of Compressive Stress on the Formation of Thermal Donors in Heat-Treated Silicon   [ 253 K ]
  Authors: Andrzej Misiuk, Boris A. Andreev, Valentin V. Emtsev, Charalamos A. Londos, G.A. Oganesyan, D.S. Poloskin
• p267 Helium Bubble Growth in Silicon: Ripening or Bubble Motion and Coalescence?   [ 296 K ]
  Authors: V.M. Vishnyakov, S.E. Donnelly, G. Carter, R.C. Birtcher, L. Haworth
• p273 Void Shrinkage during Thermal Oxidation of Silicon   [ 428 K ]
  Authors: Vito Raineri, Stella Giuffrida, Emanuele Rimini
• p279 Gettering Induced by Helium Implantation: Application to a Device   [ 466 K ]
  Authors: F. Roqueta, Daniel Alquier, Laurent Ventura, B. Lopez
• p285 Defects Created by Helium Implantation at Different Temperatures in Silicon   [ 373 K ]
  Authors: Marie-Laure David, Erwan Oliviero, A. Ratchenkova, Nikolai N. Gerasimenko, A. Declémy, Jean François Barbot, A. van Veen, Marie France Beaufort
• p291 Damage Evolution in Helium-Hydrogen Co-Implanted (100) Silicon   [ 396 K ]
  Authors: R. Tonini, F. Corni, C. Nobili, G. Ottaviani, F. Cazzaniga, G. Queirolo
• p297 Gold Gettering by H⁺ or He⁺⁺ Ion Implantation Induced Cavities and Defects in Cz Silicon Wafers   [ 313 K ]
  Authors: Isabelle Périchaud, E.B. Yakimov, Santo Martinuzzi, Christiane Dubois
• p303 Influence of Depth in Helium Desorption from Cavities Induced by ³He Implantation in Silicon   [ 181 K ]
  Authors: R. Delamare, E. Ntsoenzok, F. Labohm, A. van Veen
• p309 Dopant Segregation on Cavities Induced by Helium Implantation: The Case of Boron and Phosphorus   [ 438 K ]
  Authors: Frédéric Cayrel, Daniel Alquier, F. Roqueta, Laurent Ventura, Christiane Dubois, Robert Jérisian, D. Mathiot