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Gettering and Defect Engineering in Semiconductor Technology XI

Solid State Phenomena Volumes 108 - 109

• Papers
• Abstracts

• p321 Defect Engineering in Ion Beam Synthesis of SiC and SiO₂ in Si   [ 861 K ]
  Authors: R. Kögler, A. Mücklich, J.R. Kaschny, H. Reuther, F. Eichhorn, H. Hutter, Wolfgang Skorupa
• p327 Electrical Passivation of Silicon Wafers   [ 544 K ]
  Authors: M. Kunst, Frank Wünsch, O. Abdallah, G. Citarella
• p333 Point Defects Interaction with Extended Defects and Impurities and Its Influence on the Si-SiO₂ System Properties   [ 220 K ]
  Authors: Daniel Kropman, U. Abru, T. Kärner, U. Ugaste, E. Mellikov, M. Kauk, I. Heinmaa, A. Samoson, Arthur Medvid
• p339 Magnetic-Field-Induced Modification of Properties of Silicon Lattice Defects   [ 142 K ]
  Authors: V.A. Makara, L.P. Steblenko, Yu.L. Kolchenko, S.M. Naumenko, O.A. Patran, V.M. Kravchenko, O.S. Dranenko
• p345 Phase Transition on Surface of IV Group Semiconductors by Laser Radiation   [ 24 M ]
  Authors: Arthur Medvid, Pavels Onufrijevs, Dainis Grabovskis, Aleksandrs Mychko, Valentinas Snitka, Petr M. Lytvyn, Valentina Plaushinaitiene
• p351 Stress - Dependent Out - Annealing of Defects in Self - Implanted Silicon   [ 605 K ]
  Authors: Andrzej Misiuk, Barbara Surma, Jadwiga Bak-Misiuk
• p357 A New Approach to Study the Damage Induced by Inert Gases Implantation in Silicon   [ 598 K ]
  Authors: S. Peripolli, Marie France Beaufort, David Babonneau, Sophie Rousselet, P.F.P. Fichtner, L. Amaral, Erwan Oliviero, Jean François Barbot, S.E. Donnelly
• p365 First Principles Calculation for Point Defect Behavior, Oxygen Precipitation and Cu Gettering in Czochralski Silicon   [ 1 M ]
  Authors: K. Sueoka, S. Shiba, S. Fukutani
• p373 On the Effect of Lead on Irradiation Induced Defects in Silicon   [ 185 K ]
  Authors: Marie-Laure David, Eddy Simoen, C. Claeys, V.B. Neimash, M. Kras'ko, A. Kraitchinskii, V. Voytovych, A. Kabaldin, Jean François Barbot
• p379 Formation and Properties of Iron-Phosphorus and Iron-Phosphorus-Hydrogen Complexes in Silicon   [ 209 K ]
  Authors: Teimuraz Mchedlidze