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Gettering and Defect Engineering in Semiconductor Technology XII

Solid State Phenomena Volumes 131 - 133

• Papers
• Abstracts

• p315 The Temperature Evolution of the Hydrogen Plasma Induced Structural Defects in Crystalline Silicon   [ 2 M ]
  Authors: Heidi Nordmark, Alexander G. Ulyashin, John Charles Walmsley, Arve Holt, Randi Holmestad
• p321 Electrical Uniformity of Direct Silicon Bonded Wafer Interfaces   [ 1 M ]
  Authors: Magnus C. Wagener, R.H. Zhang, W. Zhao, M. Seacrist, M. Ries, George A. Rozgonyi
• p327 Structure of Magnetically Ordered Si:Mn   [ 4 M ]
  Authors: Jadwiga Bak-Misiuk, E. Dynowska, P. Romanowski, A. Shalimov, Andrzej Misiuk, S. Kret, P. Dluzewski, J. Domagala, Wolfgang Caliebe, J. Dabrowski, M. Prujszczyk
• p333 Influence of Low-Temperature Argon Ion-Beam Treatment on the Photovoltage Spectra of Standard Cz Si Wafers   [ 225 K ]
  Authors: Anis M. Saad, Olga V. Zinchuk, N.A. Drozdov, A.K. Fedotov, A.V. Mazanik
• p339 Defect Engineering for SIMOX Processing   [ 547 K ]
  Authors: R. Kögler, A. Mücklich, W. Anwand, F. Eichhorn, Wolfgang Skorupa
• p345 Hydrogen Interaction with Point Defects in the Si-SiO₂ Structures and its Influence on the Interface Properties   [ 179 K ]
  Authors: Daniel Kropman, E. Mellikov, T. Kärner, Ü. Ugaste, Tony Laas, I. Heinmaa, U. Abru, Arthur Medvid
• p351 IR Studies on the Interaction between Thermal and Radiation Defects in Silicon   [ 162 K ]
  Authors: Charalamos A. Londos, G.D. Antonaras, M.S. Potsidi, E.N. Sgourou, I.V. Antonova, Andrzej Misiuk
• p357 Diffusion and Activation of Ultra Shallow Boron Implants in Silicon in Proximity of Voids   [ 620 K ]
  Authors: O. Marcelot, A. Claverie, Daniel Alquier, Frédéric Cayrel, Wilfried Lerch, Silke Paul, L. Rubin, Vito Raineri, Filippo Giannazzo, H. Jaouen
• p363 Radiation-Induced Defect Reactions in Cz-Si Crystals Contaminated with Cu   [ 193 K ]
  Authors: V.P Markevich, A.R. Peaker, I.F. Medvedeva, Vasilii E. Gusakov, L.I. Murin, B.G. Svensson
• p369 The Role of High Temperature Treatments in Stress Release and Defect Reduction   [ 180 K ]
  Authors: Isabella Mica, Maria-Luisa Polignano, Emiliano Bonera, Gian Pietro Carnevale, P. Magni