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HomeSolid State PhenomenaSolid State Phenomena Vol. 134Electrical Impact of Various Arsenic-Residues...

Electrical Impact of Various Arsenic-Residues Cleanings

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Periodical:

Solid State Phenomena (Volume 134)

Pages:

23-26

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.134.23

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Online since:

November 2007

Authors:

Y.S. Tan, S.P. Chiew, Z. Yang, Zainab Ismail, Felicia Goh, Christopher Lim, Vincent Sih, Ee Ping Yu, Goh Boon Cheng

Keywords:

Arsenic Residues, Pre Silicidation Clean

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© 2008 Trans Tech Publications Ltd. All Rights Reserved

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