Paper Titles
Cure Monitoring of Composites Based on Embedded Fiber Bragg Gratings
p.585
Research on Intelligent Control System of Pressure Forming Equipment for Stator and Rotor
p.590
Research and Design on Universal Framework for Integration CAD / CAE System
p.595
Subjective Evaluation of Construction Machinery Cab’s Comfort Based on Fuzzy Set Theory
p.600
Fabircaiton and Characterization of a New Bi-Stable Electromagnetic Microrelay
p.605
The Study of Characteristics of Sphere-Radial Phononic Crystals
p.609
Research about Tool Management Based on FMS
p.615
Mechanism Simulation Based on ADAMS and Structure Optimization for Automobile Punching Parts On-Line Detector
p.619
Analysis on Effect of Heat Bridge to Heat Transfer of Refuge Chamber’s Shell
p.624

Fabircaiton and Characterization of a New Bi-Stable Electromagnetic Microrelay

Article Preview

Abstract:

This paper reports the fabrication and characterization of a new bi-stable electromagnetic microrelay based on surface micromachining technology. It mainly consists of an integrated coil, a SU-8 spacer, a nickel planar spring in combination with permanent magnet, and electrical contacts. With current, the spring is attracted or pulled up to close or open the external circuit. Without current, permanent magnet keeps the spring at bottom which reduced the power consumption. The bi-stability of electromagnet microrelay is realized by the balance between magnetic force and the elastic force of the spring. The detailed fabrication process is given. Testing results shows that this new bi-stable electromagnetic microrelay can work at 5V voltage pulse with large deflection at 350μm and switching time is fast at 4.96due to special design.

You might also be interested in these eBooks
Mechatronics and Intelligent Materials View Preview

Info:

Periodical:

Advanced Materials Research (Volumes 211-212)

Pages:

605-608

DOI:

https://doi.org/10.4028/www.scientific.net/AMR.211-212.605

Citation:

Cite this paper

Online since:

February 2011

Authors:

Xiao Dan Miao, Xu Han Dai, Pei Hong Wang, Gui Fu Ding, Xiao Lin Zhao

Keywords:

Bi-Stable, Electromagnetic, Micro-Electromechanical System (MEMS), Microrelay

Export:

RIS, BibTeX

Price:

Permissions CCC:

Request Permissions

Permissions PLS:

Request Permissions

Сopyright:

© 2011 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

References

[1] THIELICKE E, OBERMEIER E. The 12th International Conference on Solid State Sensors and Actuators and Microsystems. Boston, (2003), p.899.

Google Scholar

[2] QIU J, LANG J H, SLOCUM A H, et al. Journal of Microelectromechanical Systems, 14(2005)，p.1099.

Google Scholar

[3] J. D. Williams, R. Yang, and W. Wang, Sensors and Actuators A, vol. 120(2005) , p.154.

Google Scholar

[4] Shi Fu, Guifu Ding, Hong Wang, Zhuoqing Yang, Jianzhi Feng , Microelectronics Journal vol. 38 (2007) , p.556.

Google Scholar

[5] Yong-hua Zhang, Gui-fu Ding, Xu-han Dai, Bing-chu Cai, electronics letters vol. 10(2005)，p.1276.

Google Scholar

[6] G.D. Gray Jr.,P.A. Kohl, Sensors and Actuators A vol. 119(2005), p.489.

Google Scholar