Paper Title:
Design of Displacement Measuring System for Nano-Hardness Test Device
  Abstract

Nano-hardness test device has the ability to make the load-displacement measurement with sub-nanometer indentation depth sensitivity, and the nanohardness of the material can be got from the load-displacement curve by Oliver-Pharr method. In order to measure the small displacement accurately, we designed a capacitive displacement measuring system. This capacitance micrometer has a resolution of 0.1nm, and is suitable for our nano-hardness test device.

  Info
Periodical
Edited by
Kai Cheng, Yingxue Yao and Liang Zhou
Pages
518-521
DOI
10.4028/www.scientific.net/AMM.10-12.518
Citation
Q. Liu, Y. X. Yao, L. Zhou, "Design of Displacement Measuring System for Nano-Hardness Test Device", Applied Mechanics and Materials, Vols. 10-12, pp. 518-521, 2008
Online since
December 2007
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