Paper Title:
Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer
  Abstract

Multidisciplinary design optimization of a biaxial capacitive micro-accelerometer with the crab-leg flexural suspension is discussed. Considering the influence of microstructure design, fabrication process and detection circuit, as well as the constraints of fabrication limitations, damp design and adhesion factor, a multidisciplinary optimization model is developed by global criterion method. Furthermore, genetic algorithm is applied to obtain the multi-objective optimum of the proposed multidisciplinary design model.

  Info
Periodical
Chapter
Chapter 2: Simulation and Engineering Optimization
Edited by
Di Zheng, Yiqiang Wang, Yi-Min Deng, Aibing Yu and Weihua Li
Pages
530-533
DOI
10.4028/www.scientific.net/AMM.101-102.530
Citation
Y. Liu, H. Y. Yang, G. C. Wang, "Genetic Algorithm Based Multidisciplinary Design Optimization of MEMS Accelerometer", Applied Mechanics and Materials, Vols. 101-102, pp. 530-533, 2012
Online since
September 2011
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$32.00
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