Paper Title:
Improved Hysteresis Model of Micro-Positional Stage Based on PI Model
  Abstract

In order to obtain higher accuracy and faster calculation speed of hysteresis model of the piezoelectric micro-positional stage, the traditional PI hysteresis model is improved in this paper. First, based on the fact of that the slopes of the first half of the initial loading curve for the piezoelectric micro-positional stage change much while the slopes of the second half change little, the PI hysteresis model of the stage is established by the non-equiinterval threshold value. Then, the established model is identified by optimizing the minimum L22-norm of the model errors. The results show that the maximum error and average error of the model are 0.71 μm and 0.23 μm in the displacement range of 22.75 μm, respectively.

  Info
Periodical
Chapter
Chapter 2: Simulation and Engineering Optimization
Edited by
Di Zheng, Yiqiang Wang, Yi-Min Deng, Aibing Yu and Weihua Li
Pages
581-585
DOI
10.4028/www.scientific.net/AMM.101-102.581
Citation
Y. Li, Y. G. Cui, S. Y. Zheng, "Improved Hysteresis Model of Micro-Positional Stage Based on PI Model", Applied Mechanics and Materials, Vols. 101-102, pp. 581-585, 2012
Online since
September 2011
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Price
$32.00
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