Paper Title:
A Zero TCF SAW Contact Stress Sensor in ZnO/SiO2/Si Structure
  Abstract

A thin sensor based on surface acoustic wave resonator (SAWR) in ZnO/SiO2/Si structure for wireless contact stress measurement in thin gap is numerically analyzed. Firstly, the scheme of the SAWR stress sensor and surface effective permittivity for analyzing surface acoustic wave (SAW) in ZnO/SiO2/Si structure are introduced. Then, the phase velocity and electromechanical coupling coefficient of ZnO(1µm)/SiO2(1.4µm)/Si structure for the fundamental and first Rayleigh mode are obtained. For both Rayleigh modes, the temperature coefficient of frequency (TCF) for the structure at different frequency is calculated. Good temperature stability for the structure is achieved at frequency 1GHz for the first Rayleigh mode with averaged TCF about 0.04ppm/°C and stress sensitivity about 22ppm/MPa.

  Info
Periodical
Chapter
Chapter 8: Measurement
Edited by
Paul P. Lin and Chunliang Zhang
Pages
1894-1898
DOI
10.4028/www.scientific.net/AMM.105-107.1894
Citation
J. X. Ding, D. Chen, L. Du, G. M. Liu, "A Zero TCF SAW Contact Stress Sensor in ZnO/SiO2/Si Structure", Applied Mechanics and Materials, Vols. 105-107, pp. 1894-1898, 2012
Online since
September 2011
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Price
$32.00
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