Paper Title:
A Study of Temperature Dependence for Capacitive Pressure Sensor
  Abstract

In order to reveal the temperature dependence of a touch mode capacitive pressure sensor, temperature dependence of material parameters of the sense have been studied. Using Finite Element Method (FEM) to simulate and solve capacitance, the results show that the relation of capacitance and temperature is almost linear in touch state of the sensor. At the same time, temperature sensitivities under different pressure are slight difference, which are 0.0056pF/K and 0.0040pF/K, respectively. Therefore, the high-temperature performance of the sensor is greatly outstanding.

  Info
Periodical
Chapter
Chapter 8: Measurement
Edited by
Paul P. Lin and Chunliang Zhang
Pages
2024-2027
DOI
10.4028/www.scientific.net/AMM.105-107.2024
Citation
H. J. Lv, G. Q. Hu, X. Y. Wang, "A Study of Temperature Dependence for Capacitive Pressure Sensor", Applied Mechanics and Materials, Vols. 105-107, pp. 2024-2027, 2012
Online since
September 2011
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Price
$32.00
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