Paper Title:
Design and Fabrication of a Micro-Capacitor for Nano Probing System
  Abstract

Quantitative dimensional metrologies of Nano/microstructures are increasingly demanded following the rapid developments in, for instance, semiconductor and precision engineering industry, microsystem technology and materials science. In the recent years, coordinate measuring machines (CMMs) have become versatile and widespread metrology tools. Probing system is an important component of a CMM. A probing system based on a high accurate positioning transducer is crucial for micro and nano metrology. This paper presents a probing system based on a variable micro-capacitive transducer which has advantages of simple structure, low cost, high sensitivity, overload ability, excellent dynamic response characteristics, etc. The structure of variable capacitor was designed and optimized by means of finite element method (FEM), and fabricated by surface micromachining technology.

  Info
Periodical
Chapter
Chapter 9: Manufacturing Engineering and Simulation
Edited by
Paul P. Lin and Chunliang Zhang
Pages
2255-2258
DOI
10.4028/www.scientific.net/AMM.105-107.2255
Citation
M. X. He, X. Lu, X. Chen, X. Ling, Y. Li, H. Wang, G. F. Ding, "Design and Fabrication of a Micro-Capacitor for Nano Probing System", Applied Mechanics and Materials, Vols. 105-107, pp. 2255-2258, 2012
Online since
September 2011
Export
Price
$32.00
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