Paper Title:
Study of Two-Step Electroless Etched Si Nanowire Arrays
  Abstract

The influence of the nucleation process of Ag particles on the formation of Si nanowire arrays is investigated by two-stage electroless chemical etching. The dimensions of the Ag particles formed in the first stage of the process play an important role in the formation of the Si nanowires. The nucleation and etch result are analysed using SEM. The electrical properties of the resulting Si NW arrays are also studied.

  Info
Periodical
Chapter
Chapter 15: Meso/Micro Manufacturing Equipment and Processes
Edited by
Wu Fan
Pages
3284-3288
DOI
10.4028/www.scientific.net/AMM.110-116.3284
Citation
C. B. Li, K. Fobelets, Z. A.K. Durrani, "Study of Two-Step Electroless Etched Si Nanowire Arrays", Applied Mechanics and Materials, Vols. 110-116, pp. 3284-3288, 2012
Online since
October 2011
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