Paper Title:
The Formation of Diamond-Like Carbon Film at Atmospheric Pressure by the Pulsed Laser/Plasma Hybrid Deposition Method
  Abstract

A pulsed laser/plasma hybrid deposition method has been developed to produce the diamond-like carbon (DLC) film at atmospheric pressure in this work. A plasma torch was used to heat up the carbon particles which were simultaneously ablated by a pulsed laser, thus the kinetic energy of the carbon particle can be increased to form the carbon atoms with amorphous bonding structure of the DLC film. The influences of the plasma flow have been examined at various inlet pressures. According to the experimental results of the carbon film inspected by the Raman spectroscopy, it reveals that the intensity ratio of the D-band to G-band of the carbon film can be reduced to 0.5 by the implementation of plasma flow. Therefore the DLC film was solidly formed. The adhesive strength of the DLC film was also characterized by the scratch test, it can be found that the critical loading of the film on the iron substrate is up to 19 N.

  Info
Periodical
Chapter
Chapter 19: Nanofabrication, Nanometrology and Applications
Edited by
Wu Fan
Pages
3737-3741
DOI
10.4028/www.scientific.net/AMM.110-116.3737
Citation
H. P. Wang, J. M. Lin, "The Formation of Diamond-Like Carbon Film at Atmospheric Pressure by the Pulsed Laser/Plasma Hybrid Deposition Method", Applied Mechanics and Materials, Vols. 110-116, pp. 3737-3741, 2012
Online since
October 2011
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Price
$35.00
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