Paper Title:
MEMS Vector Hydrophone Structual Error Analysis and Testing
  Abstract

In this paper, we analysis the working principle of a cilium-type MEMS vector hydrophone, by analyzing we obtained the errors of the vector micro-sensor are deviations from column cilium. Since the structure is mainly picking up sound vibrations by the cilium, the piezoresistor which on the beams connected by Wheatstone bridge circuit will output the signals, so the deviation of cilium cylinder have greater impact the sensitivity in both directions of vector hydrophone. Through theoretical calculation and finite element simulation of the sensitive structure of the error analysis. By the structure of the hydrophone error test ,we obtained the sensitivity of X direction is 0.755mv / g, the sensitivity of Y direction is 0.683mv / g, The relative sensitivity error of two directions is 9.5% which is close to the simulation results. Finally, this paper give a solution to the error. (Abstract)

  Info
Periodical
Chapter
Chapter 22: Metrology and Measurement
Edited by
Wu Fan
Pages
4465-4470
DOI
10.4028/www.scientific.net/AMM.110-116.4465
Citation
G. X. Shi, G. J. Zhang, X. B. Liu, X. Y. Wang, J. Xu, "MEMS Vector Hydrophone Structual Error Analysis and Testing", Applied Mechanics and Materials, Vols. 110-116, pp. 4465-4470, 2012
Online since
October 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Yun Bo Shi, Ping Li, Jun Liu
Abstract:Aiming to the application requirements of high overload environment, a MEMS acceleration sensor with high overload ability was designed in...
1582
Authors: Wei Li Shi, Chen Yang Xue, Zhen Xin Tan, Jun Liu, Wen Dong Zhang
NEMS/MEMS Technology and Devices
Abstract:An experimental investigation has been carried out with clarifying the external mechanical stress effect on GaAs metal-semiconductor...
3121
Authors: Chang De He, Wen Dong Zhang, Ji Jun Xiong, Chen Yang Xue, Gui Xiong Shi
Chapter 7: Machining
Abstract:A 50,000g three-axis accelerometer using a single proof mass is presented. The sensitive structure is made of a single proof mass and eight...
691
Authors: Zhi Gang Zhao
Chapter 11: Computer Application and CAD/CAE
Abstract:The basic principle of Ring Oscillator Accelerometer is analyzed in this paper. On the basic of simulation and analysis of the structure of...
3635
Authors: Jian Li, Xian Hui Chen, Yan Han
Chapter 2: Sensors
Abstract:This paper introduces the omnidirectional vibration sensor based on MEMS three accelerometer, which is used to solve the problem that the...
132