Paper Title:
Study of a Novel Electrostatic Detection Sensor
  Abstract

In order to obtain the aerial target’s electrostatic information, a novel electrostatic detection sensor is proposed. With the help of simulating method, the characteristics curve which contains the target’s position and orientation is acquired. Then the electrostatic detection sensor is tested with the help of experiment, results indicate performance of the electrostatic detection sensor is related to target’s some parameters, sensor’s layout and sensitivity of relevant circuit. It provides the basis for further practicality.

  Info
Periodical
Chapter
Chapter 24: Semiconductor Materials Manufacturing
Edited by
Wu Fan
Pages
5476-5482
DOI
10.4028/www.scientific.net/AMM.110-116.5476
Citation
Y. X. Li, L. X. Xu, "Study of a Novel Electrostatic Detection Sensor", Applied Mechanics and Materials, Vols. 110-116, pp. 5476-5482, 2012
Online since
October 2011
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