Polycrystalline ZnO thin films codoped with Cu and N have been obtained by chemical bath deposition. The effect of N incorporation and Cu-N incorporation on microstructure and optical properties of ZnO films has been investigated. X-ray diffraction patterns of the films indicated N incorporation deteriorated the crystalline quality while Cu-N incorporation improved the crystalline quality. The PL spectra showed that the relative intensity between the ultraviolet luminescence and the deep level-center luminescence of ZnO thin films was clearly correlated with the crystalline quality. Furthermore, the Raman spectra revealed the intensity of E2 (high) increase with Cu-N incorporation.