Paper Title:
A Study on Magnetic Filter Controlling TiN Films Prepared by Arc Ion Plating
  Abstract

TiN thin films were deposited by Arc Ion Plating(AIP) with or without Magnetic Filter(AIP or MFAIP) on silicon(Si) and high-speed steel(HSS) substrates,respectively.Scanning Electron Microscope(SEM),X-ray Diffraction(XRD),nanoindentation and microscratch tests were applied for microstructure and property investigation.SEM data showed that the AIP films are plagued with macro-particles(MPs),while the MFAIP films have no or less MPs.XRD showed that the MFAIP films have more obvious preferred orientation at (111) than the AIP films.Scratch Crack Propagation Resistance(CPRs) was introduced to evaluate the film adhesion properties in a scratch test.MFAIP films had higher adhesion.AIP films were susceptible to failure as the CPRs was lower.The MFAIP films had higher hardness than the AIP ones, due to the reason of less MPs in MFAIP films and more obvious preferred orientation.It was proposed that the MPs were effectively removed with the magnetic filter, so the properties of the MFAIP films were greatly improved.

  Info
Periodical
Chapter
Chapter 6: New Materials and Advanced Materials
Edited by
Huixuan Zhang, Ye Han, Fuxiao Chen and Jiuba Wen
Pages
1071-1075
DOI
10.4028/www.scientific.net/AMM.117-119.1071
Citation
X. W. Shi, X. R. Li, N. Yao, X. C. Wang, K. L. Song, S. Zhang, "A Study on Magnetic Filter Controlling TiN Films Prepared by Arc Ion Plating", Applied Mechanics and Materials, Vols. 117-119, pp. 1071-1075, 2012
Online since
October 2011
Export
Price
$32.00
Share

In order to see related information, you need to Login.

In order to see related information, you need to Login.

Authors: Eun Young Choi, Chul Sik Jang, Myung Chang Kang, Kwang Ho Kim
Abstract:Ternary Ti-Cx-N1-x coatings were deposited on stainless steel substrates by arc ion plating (AIP) technique using Ti target at the...
311
Authors: Ling Chen, De Chang Zeng, Wan Qi Qiu, Xin Wei Shi, Zheng Yi Liu
Abstract:Arc ion plating(AIP) has higher deposition rates, whereas macro-particles (MPs) make the film properties decreasing. In this paper, AIP with...
61
Authors: Kyeong Cheol Baek, Chan Yeol Seo, Ki Bok Heo, Yang Soo Kim, Dong Joo Yoon, Byung Il Kim, Kyung Ku Lee, Dong Soo Han
Chapter 20: Surface Engineering & Coatings
Abstract:Arc ion plating (AIP) is one of the most attractive physical vapour deposition (PVD) method for the industrial manufacture of TiN coatings,...
2589
Authors: Chang Jie Feng, Li Xin, Sheng Long Zhu, Zhi Song Shao
Chapter 17: Materials and Products Manufacturing Technology
Abstract:Ti-Al-Si-N films were deposited on 1Cr11Ni2W2MoV steel at different N2 flow rates from 0 to 600 sccm by AIP using a Ti60Al30Si10 target. The...
2694
Authors: Guo Dong Sun, Deng Liang Yi, Chang Hua Liu
Chapter 15: Surface Engineering / Coatings Technology
Abstract:TiN and TiAlN films have been coated on the surface of tool materials by various methods for the life-time extension of tool. In this work,...
1096