Paper Title:
Analysis on the Detection Capacitance of Comb Micro-Machined Gyroscope
  Abstract

The micro-machined gyroscope is a kind of typical micro-electro-mechanical sensor, its typical working mode is electrostatic drive and comb capacitive detection. As for as the transverse detection capacitance structure now commonly used, we find out that the relationship between capacitance variation and displacement is nonlinear through analyzing its detection capacitance. This nonlinearity will greatly affect the dynamic performance of micro-machined gyroscope.

  Info
Periodical
Chapter
Chapter 1: Materials Science and Engineering
Edited by
Dongye Sun, Wen-Pei Sung and Ran Chen
Pages
33-37
DOI
10.4028/www.scientific.net/AMM.121-126.33
Citation
H. P. Liu, S. Q. Gao, L. Jin, "Analysis on the Detection Capacitance of Comb Micro-Machined Gyroscope", Applied Mechanics and Materials, Vols. 121-126, pp. 33-37, 2012
Online since
October 2011
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Price
$32.00
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