Paper Title:
Appling of New Optical Measurement and Theory in Mechanical Properties of Thin Film
  Abstract

The thesis aims to characterize the mechanical properties and stresses for thin films deposited on the circular substrates. First, the thin films with the same deposition condition were successively deposited on the distinct substrates using the evaporation technique. The phase-shifting Twyman-Green interferometer (PSTGI) was then employed to measure the warpage of the film-substrate structures and therefore the intrinsic stresses and thermal stresses can be calculated from the well-known Stoney’s formula. The coefficients of thermal expansion (CTE) and Young’s modulus of thin films were also obtained from the Stoney’s theory. Furthermore, the merit of full-field character of optical interferometry was used to propose a novel methodology using the Chen and Ou’s theory to improve the accuracy and to reduce the experiment procedures in the traditional measurement of the aforementioned mechanical properties. Finally, the measured results corresponding to the traditional and proposed methods were respectively substituted into their adopted theories to compare their difference. The results reveal that the accuracy of proposed methodology is considerably improved and the experimental procedures are reduced to those of the traditional methods.

  Info
Periodical
Chapter
Chapter 7: Computer Application in Design and Manufacturing (2)
Edited by
Dongye Sun, Wen-Pei Sung and Ran Chen
Pages
4295-4299
DOI
10.4028/www.scientific.net/AMM.121-126.4295
Citation
H. M.A. Yun, L. P. Chao, J. S. Hsu, "Appling of New Optical Measurement and Theory in Mechanical Properties of Thin Film", Applied Mechanics and Materials, Vols. 121-126, pp. 4295-4299, 2012
Online since
October 2011
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Price
$32.00
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